Theoretical calculation of composition, atomic and molecular spectral lines in Ar-SF6 plasma out of thermal equilibrium
Résumé
In this paper we calculate the intensity emitted by different atomic lines and by the (B 3Sigmau--X 3Sigmag-) system of S2. We show the influence on intensity of the deviation from thermal equilibrium and of the hypotheses on different temperatures (atomic excitation temperature Texat, rotational temperature Trot, vibrational temperature Tvib, diatomic excitation temperature Texmol, translation temperature of free electrons Te-tr and translation temperature of heavy species Thtr). From this method, we show that from optical emission of atomic line and diatomic molecule spectra, the deviation from thermal equilibrium and consequently the composition of plasma can be determined.