Communication Dans Un Congrès Année : 2021

Controlled oxidation of strontium and tantalum based films deposited by magnetron sputtering under reactive nitrogen or pure argon

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hal-05330380 , version 1 (24-10-2025)

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  • HAL Id : hal-05330380 , version 1

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Claire Le Paven, Mohamad Haydoura, Laurent Le Gendre, Ratiba Benzerga, Ala Sharaiha, et al.. Controlled oxidation of strontium and tantalum based films deposited by magnetron sputtering under reactive nitrogen or pure argon. 14th Pacific Rim Conference on Ceramic and Glass Technology (PACRIM 14), Virtual, Dec 2021, Virtual conference, France. ⟨hal-05330380⟩
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