Thin film ring resonators on polished LTCC multilayer for improved RF performance
Résumé
This paper presents the fabrication of thin-film ring resonators on low temperature co-fired ceramic (LTCC) substrates using lapping, polishing, direct-write photolithography, and electron-beam physical vapor deposition. The approach improves surface quality, enabling highresolution patterning and precise resonance behavior. Geometric fidelity is confirmed, and high-frequency measurements show resonance peaks near the 10 GHz design target with minimal variation. The results demonstrate the feasibility of this process for high-performance RF applications using maskless lithography on polished LTCC.
| Origine | Fichiers produits par l'(les) auteur(s) |
|---|---|
| Licence |