Communication Dans Un Congrès Année : 2025

Thin film ring resonators on polished LTCC multilayer for improved RF performance

Résumé

This paper presents the fabrication of thin-film ring resonators on low temperature co-fired ceramic (LTCC) substrates using lapping, polishing, direct-write photolithography, and electron-beam physical vapor deposition. The approach improves surface quality, enabling highresolution patterning and precise resonance behavior. Geometric fidelity is confirmed, and high-frequency measurements show resonance peaks near the 10 GHz design target with minimal variation. The results demonstrate the feasibility of this process for high-performance RF applications using maskless lithography on polished LTCC.

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hal-05317049 , version 1 (16-10-2025)

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  • HAL Id : hal-05317049 , version 1

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Norayr Nessimian, Achraf Sadeddine, Jens Müller, Heike Bartsch. Thin film ring resonators on polished LTCC multilayer for improved RF performance. The 25th European Microelectronics & Packaging Conference (EMPC 2025), IMAPS, Sep 2025, Grenoble, France. ⟨hal-05317049⟩
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