Article Dans Une Revue Optics Express Année : 2025

Impact of localized defects in light scattered by optical components: measurement and analysis

Résumé

Defects and contaminants can be a critical source of performance loss. This paper presents and demonstrates the capabilities of a new SPatially and Angularly Resolved Scatterometry Equipment (SPARSE) designed to measure spatially resolved ARS of optical surfaces. Besides a calibration sample, the measurement results of three samples are detailed here. They show the amount of information accessible from a measurement, including the ability to distinguish between roughness, localized defects, and scratches. The scattered light generated by each of these three types of defects can be quantified independently.

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hal-05237979 , version 1 (03-09-2025)

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Adrien Bolliand, Michel Lequime, Claude Amra, Myriam Zerrad. Impact of localized defects in light scattered by optical components: measurement and analysis. Optics Express, 2025, 33 (11), pp.22396. ⟨10.1364/OE.551695⟩. ⟨hal-05237979⟩
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