Early Measurements of Silicon Axisymmetric MEMS Gyro
Résumé
This paper presents preliminary results of a new silicon MEMS gyro. This MEMS Coriolis Vibratory Gyroscope (CVG) is based on link elements with counterweight that balance the proof mass momentum assuring its insulation from the environment. We demonstrated high quality factor up to 100 000 for a resonant frequency of 8 kHz. A high linearity (R2 > 0.9999) of the scale factor has been demonstrated over a +/-1000 °/s angular rate range. An Allan variance has been measured and it demonstrated an ARW in open loop of 17 °/√h, which suggest promising performance in closed-loop operation.
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