Communication Dans Un Congrès Année : 2025

Early Measurements of Silicon Axisymmetric MEMS Gyro

Résumé

This paper presents preliminary results of a new silicon MEMS gyro. This MEMS Coriolis Vibratory Gyroscope (CVG) is based on link elements with counterweight that balance the proof mass momentum assuring its insulation from the environment. We demonstrated high quality factor up to 100 000 for a resonant frequency of 8 kHz. A high linearity (R2 > 0.9999) of the scale factor has been demonstrated over a +/-1000 °/s angular rate range. An Allan variance has been measured and it demonstrated an ARW in open loop of 17 °/√h, which suggest promising performance in closed-loop operation.

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Dates et versions

hal-05166627 , version 1 (07-11-2025)

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Lucas Hudeley, Raphaël Levy, Maxime Duquesnoy, Jérémy Bonhomme, Olivier Le Traon, et al.. Early Measurements of Silicon Axisymmetric MEMS Gyro. 2025 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), May 2025, Lindau, Germany. pp.1-4, ⟨10.1109/INERTIAL63280.2025.11037183⟩. ⟨hal-05166627⟩
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