2D boron nitride synthesis via electromagnetic induction heating: Experiments and thermochemical modeling
Résumé
We present a novel approach for synthesizing few-layered two-dimensional boron nitride (FL-BN) using low pressure chemical vapor deposition (LPCVD). In our approach, a radio frequency (RF) magnetic field was generated to inductively heat copper foils. The process involved placing the copper foil on a tungsten substrate and applying inductive heating until the copper melted within about two minutes. Subsequently, boron-nitrogen precursors were generated via the decomposition of ammonia borane at approximately 80°C, and these species were then transported by an argon/hydrogen flow to the liquid Cu, promoting the nucleation and growth of h-BN. Thermochemical calculations performed by using ChemkinPro software indicated the prevalence of B-N-H species within the temperature range of 20°C to 1100°C, surpassing the melting point of copper. The resulting h-BN layers exhibited exceptional structural integrity, as confirmed by Raman and X-ray photoelectron spectroscopy (XPS) analyses. Furthermore, room-temperature cathodoluminescence (CL) measurements revealed a prominent excitonic peak at the photon energy position 5.77 eV (215 nm), which is a consequence of the deep UV optical gap of the h-BN crystal. Thus, the inductive heating process demonstrates significant potential for large-scale and rapid manufacturing of h-BN, offering enhanced energy efficiency. Additionally, we introduce a new conceptual design enabling precise control of the synthesis parameters, thus facilitating scalable production of high-quality h-BN films.
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