Near-Field Scanning Microwave Microscopy Simulation Using CST Microwave Studio
Résumé
CST Microwave Studio is considered to design and simulate the interaction between a near-field scanning microwave microscopy (NSMM) probe and micro-sized metal oxide semiconductor (MOS) capacitors. Special attention is given to the meshing strategy to ensure accurate simulation data across a wide frequency range of up to 30 GHz. Preliminary results demonstrate the interest of the approach proposed for further analysis and modelling.
Domaines
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