Communication Dans Un Congrès Année : 2024

Near-Field Scanning Microwave Microscopy Simulation Using CST Microwave Studio

Résumé

CST Microwave Studio is considered to design and simulate the interaction between a near-field scanning microwave microscopy (NSMM) probe and micro-sized metal oxide semiconductor (MOS) capacitors. Special attention is given to the meshing strategy to ensure accurate simulation data across a wide frequency range of up to 30 GHz. Preliminary results demonstrate the interest of the approach proposed for further analysis and modelling.

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Dates et versions

hal-04946858 , version 1 (13-02-2025)

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Identifiants

  • HAL Id : hal-04946858 , version 1

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Aurèle Vangheluwe, Johannes Hoffmann, Kamel Haddadi. Near-Field Scanning Microwave Microscopy Simulation Using CST Microwave Studio. IEEE MARSS 2023, IEEE International Conference on Manipulation, Automation and Robotics at Small Scales, Jul 2024, Delft, Netherlands. ⟨hal-04946858⟩
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