Tunable properties of SnOx sputter-deposited by RGPP and GLAD techniques: A potential candidate for photosensing and all-oxide solar cells
Résumé
In this work, optical and electrical properties of tin-oxide (SnOx)
thin-films were investigated for broadband photosensing and
photovoltaic applications. The GLancing Angle Deposition (GLAD) and
Reactive Gas Pulsing Process (RGPP) techniques were used to study
the effects of the oxygen ratio variation and deposition angle on
the film optoelectronic and photovoltaic properties. The deposition
angle of the particle flux was kept at 80◦ and the injected oxygen
gas concentration was tuned by changing the oxygen pulsing time
from 0 to 20 s. It is found that the material band gap increases
from 0.9 eV to 3.56 eV when the oxygen content increases. The
deposited SnOx films exhibited improved and tuned optoelectronic
properties, demonstrating their potential applications for
developing alternative broadband photosensing layers and
eco-friendly all-oxide solar cells. In this regard, SnOx-based
photosensor and all-oxide SnOx solar cell structures were developed
using the deposited thin-films. It is revealed that the prepared
SnOx photosensor shows the highest responsivity of 32.7 mA/W and
improved ION/ IOFF ratio of 48 dB. Moreover, the optimized
all-oxide SnOx solar cell demonstrates a high efficiency of 3.41 %,
a short-circuit current of 14.53 mA/cm2 and an open circuit voltage
of 0.49 V. These interesting results make the proposed elaboration
process based on combined RGPP and GLAD techniques highly suitable
for the development of high-performance optoelectronic and
photovoltaic devices based on cost-effective metal oxide materials.
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