Recently, high entropy alloys thin films (HEA-TFs) have gained interest due to their unique atomic structure leading to enhanced mechanical properties, particularly when combined with nano-sized grains (yield strength up to 7 GPa) [1]. Nanolaminate structures can be used to further improve mechanical properties by blocking the propagation of dislocations at the interfaces, with the potential to combine high plastic deformability and yield strength [2]. However, achieving fine control of the microstructure combined with the investigation of local mechanical properties represents an open challenge. Here, we developed monolithic and nanolaminate HEA-TFs by magnetron sputtering and by pulsed laser deposition (PLD). PLD, in particular, allows to precisely tune the film morphology by controlling the background pressure [3]. Firstly, we will focus on a Hall-Petch investigation on CoCrCuFeNi HEA-TFs deposited by PLD, yielding compact (2*10-3 Pa) and nanogranular (5 Pa of He) structures with controllable domain size, ranging from 11 to 38 nm. These films exhibited higher nanoindentation hardness (~11 GPa) compared to sputter-deposited counterparts (8.3 GPa) due to Hall-Petch effect. Thermal stability studies reveal that nanogranular films are able to maintain smaller domain size (~20 nm) after annealing for 1h at 460 °C, leading to higher hardness (8.6 GPa) compared to compact films (6.9 GPa, domain size ~55 nm). In a second step, Al/CoCrCuFeNi nanolaminates were prepared using PLD, allowing to easily control the bilayer period (Λ) from 2.5 to 400 nm. These films show high values of H despite a 50% volume fraction of Al, with a maximum of 10.4 GPa for a bilayer period of 25 nm thanks to the high density of interfaces. Finally, we fabricated Al/Alx(CoCrCuFeNi)100-x nanolaminates (x=0, 25 at. %) prepared by magnetron sputtering to study semi-coherent (FCC/FCC) and incoherent (FCC/BCC) interfaces. Pillar compression tests show that the FCC/BCC films have the highest yield strength (4.5 GPa) thanks to the stronger BCC phase and the incoherent interfaces, while showing high plastic deformability localized in the soft Al layers. To conclude, various HEA-TFs were prepared with great control over their nanoarchitecture, leading to enhanced mechanical properties and potential applications in industry. [1] Y. Zou et al., Nano Letters, 17, 2017; [2] Ge Wu et al., Materials today, 51, 2021; [3] M. Ghidelli et al., Acta Mat, 213, 2021