INFLUENCE OF THE RF VOLTAGE AMPLITUDE ON THE SPACE-AND TIME-RESOLVED PROPERTIES OF RF-LF DIELECTRIC BARRIER DISCHARGES IN α–γ MODE - Archive ouverte HAL
Article Dans Une Revue Plasma Sources Science and Technology Année : 2024

INFLUENCE OF THE RF VOLTAGE AMPLITUDE ON THE SPACE-AND TIME-RESOLVED PROPERTIES OF RF-LF DIELECTRIC BARRIER DISCHARGES IN α–γ MODE

Résumé

This work reports the results of an experimental and modelling study on dual-frequency Ar-NH 3 dielectric barrier discharges (DBD) exhibiting the α -γ transition. A combination of space-and timeresolved optical absorption and emission spectroscopy is used to record spatio-temporal mappings of the Ar metastable number density, Ar 750.4 nm line emission intensity, and electron-Ar Bremsstrahlung continuum emission intensity. With the increase of the RF voltage amplitude in a 50 kHz-5 MHz DBD, maximum populations of Ar excited species (1s and 2p states, linked to the population of high-energy electrons) observed in the γ mode decrease and appear earlier in the lowfrequency cycle. On the other hand, the density of the bulk electrons, monitored from the continuum emission intensity, increases, with a more prominent rise in the RF-α mode than in the γ regime.

Such behaviors are consistent with the predictions of 1D fluid model and results from a decrease of the gas voltage required for self-maintenance of the cathode sheath in the γ breakdown.

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Dates et versions

hal-04754341 , version 1 (25-10-2024)

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Raphaël Robert, Nader Sadeghi, Gerjan Hagelaar, Luc Stafford, Françoise Massines. INFLUENCE OF THE RF VOLTAGE AMPLITUDE ON THE SPACE-AND TIME-RESOLVED PROPERTIES OF RF-LF DIELECTRIC BARRIER DISCHARGES IN α–γ MODE. Plasma Sources Science and Technology, 2024, 33 (5), pp.055005. ⟨10.1088/1361-6595/ad4236⟩. ⟨hal-04754341⟩
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