Poster De Conférence Année : 2019

Combined experimental investigation and reactive transport modeling of ALD of alumina from TMA and water

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hal-04743561 , version 1 (18-10-2024)

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  • HAL Id : hal-04743561 , version 1

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Giorgos Gakis, Hugues Vergnes, Emmanuel Scheid, Andreas. G. Boudouvis, Constantin Vahlas, et al.. Combined experimental investigation and reactive transport modeling of ALD of alumina from TMA and water. RafALD, Nov 2019, Toulouse, France. ⟨hal-04743561⟩
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