FABRICATION AND CHARACTERIZATION TECHNIQUES TO STUDY FLEXIBLE MICRO LIGHT-EMITTING DIODES WITH A MILLIMETRIC RADIUS OF CURVATURE
Résumé
The interest in flexible micro light-emitting diodes (μLEDs) is growing , and specific applications can be found in biomedical research. For example, in optogenetics stimulations GaN-based μLEDs are good candidates, however, LEDs with reduced dimensions, and improved flexibility (typical dimensions < 50μm and radius of curvature (ROC) down to ~ 1 mm) are generally required. Standard, relatively thick LEDs will be limited by their rigidity. In this work, we present
the fabrication of flexible μLEDs and their opto-electronic characterization down to millimetric ROC.
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