Article Dans Une Revue J.Eur.Ceramic Soc. Année : 2024

Microstructural modifications induced by He implantation at elevated temperature in AlN

Résumé

The elastic strain and damage build-ups induced by 50 keV He implantations at elevated temperature in (0001)AlN were studied using a combination of X-ray diffraction, transmission electron microscopy and elastic recoil detection analysis experiments. No long-range migration of He atoms occurs up to 700°C. The point defect recombination is found to be enhanced with the increase of implantation temperature. When He concentration exceeds a determined temperature-dependent threshold, the stabilization of vacancies through the formation of He-vacancy clusters of critical size strongly enhances the interstitial concentration and elastic strain in proportion with the local He concentration. Above this threshold, for a critical He concentration that decreases from several at% at room temperature to a few tenths of at% at 700°C, bubbles form and induce a strong increase of disorder. Specific features observed at 700°C, including the systematic superimposition of bubble clusters with basal stacking faults, suggest the triggering between 550 and 700°C of a mechanism promoting disorder, which is discussed.

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hal-04631667 , version 1 (02-09-2024)

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S. Jublot-Leclerc, G. Bouhali, C. Bachelet, F. Pallier, L. Largeau, et al.. Microstructural modifications induced by He implantation at elevated temperature in AlN. J.Eur.Ceramic Soc., 2024, 44 (14), pp.116699. ⟨10.1016/j.jeurceramsoc.2024.116699⟩. ⟨hal-04631667⟩
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