Gas phase growth of metal-organic frameworks on microcantilevers for highly sensitive detection of volatile organic compounds - Archive ouverte HAL
Article Dans Une Revue APL Materials Année : 2024

Gas phase growth of metal-organic frameworks on microcantilevers for highly sensitive detection of volatile organic compounds

Résumé

A gas-phase technique, known as chemical vapor deposition of metal-organic frameworks (MOF-CVD), is used for sensitizing silicon cantilevers. These cantilevers are coated with a uniform and compact Zn(EtIm)2 (MAF-6) film, enabling the detection of volatile organic compounds (VOCs) through a change in the resonance frequency of the cantilever. The MOF-coated sensor exhibits remarkable sensitivity to VOCs within the 0.33–0.71 Hz/ppm range and a limit of detection (LOD) spanning from 4 to 9 ppb. Notably, these sensitivities surpass those achieved by ZnO-coated cantilevers by two orders of magnitude. This high sensitivity is attributed to the high porosity and large surface area of MAF-6. The approach employed in this work is compatible with conventional microfabrication techniques and offers an advantageous avenue for the development of highly sensitive gas sensors.
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hal-04626045 , version 1 (23-10-2024)

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Masoud Akbari, Hamza Mouharrar, Chiara Crivello, Martial Defoort, Eihab Abdel-Rahman, et al.. Gas phase growth of metal-organic frameworks on microcantilevers for highly sensitive detection of volatile organic compounds. APL Materials, 2024, 12 (6), pp.1119. ⟨10.1063/5.0206295⟩. ⟨hal-04626045⟩
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