Challenges in the synthesis & optical characterization of 2D ferroelectric Ba0.85Ca0.15Ti0.9Zr0.1O3 by RF sputtering
Résumé
Ferroelectric materials, such as BaTiO₃ and (Ba,Ca)(Ti,Zr)O₃ (BCTZ), are essential in modern technology, thanks to their permanent electrical dipoles and unique properties like piezoelectricity. These lead-free perovskites are especially valuable, offering tunability for advanced applications such as transducers and tunable lenses. Despite their potential, achieving high-quality BCTZ thin films via magnetron RF sputtering remains a significant challenge. Our current study aims to find the optimum deposition parameters for BCTZ thin films by RF sputtering.
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