Communication Dans Un Congrès Année : 2024

Scheduling semiconductor manufacturing operations in research and development environments

Résumé

This paper focuses on a scheduling problem encountered in shop floors of Research and Development (R&D) semiconductor manufacturing facilities. R&D facilities are characterized by a large product mix in very small quantities with unique/non-standard/varying processing routes, little process control of engineering experiments, dynamic prioritization of research activities, and pre-process checks. In contrast to typical scheduling problems found in semiconductor manufacturing systems, we provide and discuss the implications of factors of complexity (unknown parameters, evolving settings, R&D fab characteristics, etc.) on operations' scheduling specific to R&D environments. An existing dispatching rule-based heuristic, running in R&D settings, is challenged, investigated, and improved. Numerical experiments are conducted on a real-life instance and analyzed in terms of: (i) the sequence performance and quality, and (ii) the approximation accuracy of uncertain processing times and its impact on the decision performance.

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hal-04605647 , version 1 (28-07-2025)

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Valeria Borodin, Vincent Fischer, Agnès Roussy, Claude Yugma. Scheduling semiconductor manufacturing operations in research and development environments. ASMC 2024 - 35th Annual SEMI Advanced Semiconductor Manufacturing Conference, May 2024, Albany, United States. pp.1-6, ⟨10.1109/ASMC61125.2024.10545483⟩. ⟨hal-04605647⟩
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