Oxidation effect on optical properties of integrated waveguides based on porous silicon layers at mid-infrared wavelength - Archive ouverte HAL
Journal Articles Photonics and Nanostructures - Fundamentals and Applications Year : 2024

Oxidation effect on optical properties of integrated waveguides based on porous silicon layers at mid-infrared wavelength

Abstract

Integrated sensors based on guided optical devices can efficiently and selectively detect molecules in the midinfrared (mid-IR) spectral range, exploiting the vibrational and rotational modes of these molecules at these wavelengths. In this work, a ridge waveguide based on porous silicon (PSi) layers was developed by electrochemical etching followed by a photolithographic process. The ridge waveguide is capable of propagating light in the mid-IR range (3.90-4.35 mu m) with optical losses of approximately 10 dB/cm. An oxidation study was performed to stabilize the porous structure and identify the optimal oxidation degree, that allow mid-IR light to propagate in a ridge waveguide based on PSi material for sensing application. The results showed that the ridge waveguide remains capable of propagating light after undergoing partial oxidation at 300 C and 600 C (15% and 36% of the oxidation degree respectively) with optical losses of around 30 dB/cm and 60 dB/cm at the wavelength of 4.1 mu m, respectively.
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hal-04576799 , version 1 (30-05-2024)

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Abdallah Jaafar, Sofiane Meziani, Abdelali Hammouti, Parastesh Pirasteh, Nathalie Lorrain, et al.. Oxidation effect on optical properties of integrated waveguides based on porous silicon layers at mid-infrared wavelength. Photonics and Nanostructures - Fundamentals and Applications, 2024, 58, pp.101244. ⟨10.1016/j.photonics.2024.101244⟩. ⟨hal-04576799⟩
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