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Communication Dans Un Congrès Année : 2021

Metrology of thin layer deposition with combined XRR-GIXRF analysis at SOLEIL

Résumé

A new instrument called CASTOR is operated at the SOLEIL synchrotron facility and is dedicated to the characterization of thin films with thicknesses in the nanometer range. The instrument can combine X-ray reflectivity (XRR) measurements with fluorescence (XRF) acquisitions and especially total reflection X-ray fluorescence (TXRF) related techniques such as grazing incidence XRF (GIXRF). The instrument is now routinely installed on the hard X-ray branch of the Metrology beamline and reproducibility is studied as well as reference-free GIXRF analysis. Some representative examples are given to illustrate the capabilities of the setup and of the analysis.
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Dates et versions

hal-04553913 , version 1 (21-04-2024)

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Yves Ménesguen, Marie-Christine Lépy. Metrology of thin layer deposition with combined XRR-GIXRF analysis at SOLEIL. Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV, SPIE, Feb 2021, Online Only, France. pp.12, ⟨10.1117/12.2583702⟩. ⟨hal-04553913⟩
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