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Communication Dans Un Congrès Année : 2018

Optical constants with improved accuracy in the regions of L-, M- N- and O-absorption edges and their impact in multilayer modeling

Résumé

We are presenting a new set of measurements and a self-consistent determination of the optical constants (refractive index) of Cr, W and Pt thin films in the EUV/soft x-ray range. We use a combination of photoabsorption and reflectance data in the photon energy range 25 to 800 eV which include the L- and M-shell absorption edges of Cr and the N- and O-shell absorption edges of W and Pt. Our experimental data demonstrate for the first time highly resolved fine structure in the region of the Cr M2,3 and L2,3 edges, the W N4,5 and N2,3 edges and the Pt O2,3, N6,7 and N2,3 edges in both the absorptive and dispersive portions of the refractive index, resulting in differences of up to a factor of 3 compared to optical constant values published earlier, for these materials. The improved accuracy of the new optical constants is validated via the f-sum rule test and by simulating experimental reflectance data of single-layer and multilayer coatings containing these materials [1-3]. The implications of these new results, as well as plans for future work, will also be discussed.
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Dates et versions

hal-04549026 , version 1 (16-04-2024)

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  • HAL Id : hal-04549026 , version 1

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Regina Soufli, Franck Delmotte, Salmassi Farhad, Meyer-Ilse Julia, Burcklen Catherine, et al.. Optical constants with improved accuracy in the regions of L-, M- N- and O-absorption edges and their impact in multilayer modeling. PXRNMS (Physics of X-ray and Neutron Multilayer Structures) 2018, Laboratoire Charles Fabry, Institut d'Optique Graduate School, Université Paris-Saclay; Laboratoire de Chimie Physique Matière et Rayonnement, Sorbonne Université; CNRS, Nov 2018, Palaiseau, France. ⟨hal-04549026⟩
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