Design and optimisation of XUV multilayer mirrors for FEL and Synchrotron Radiation facilities
Résumé
Here we report on recent advances in design and optimization of reflective multilayer coatings for use at the FEL and Synchrotron radiation facilities operating in a wide spectral range - from extreme ultra-violet to x-ray. Development of multilayer optics with specific spectral characteristics and enhanced temporal, thermal and radiation stability requires a new approach to the choice of material combinations and optimization of interfaces and caps. Some aspects of the multilayer design, deposition and characterization will be discussed. We will present some recent results on periodic and aperiodic multilayer systems developed in LCF for various applications and energy ranges - selective or large-band for normal or grazing incidence. The multilayers are deposited by magnetron sputtering and tested primarily by grazing incidence x-ray reflectometry, which is specially adapted to characterize thin sub-nanometric layers.