Communication Dans Un Congrès Année : 2019

Design, fabrication and characterization of a buckled beam actuator for micro-displacement applications

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hal-04503452 , version 1 (13-03-2024)

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Zhichao Shi, David Bouville, Emile Martincic, Johan Moulin, Elie Lefeuvre, et al.. Design, fabrication and characterization of a buckled beam actuator for micro-displacement applications. 2019 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP), May 2019, Paris, France. pp.1-3, ⟨10.1109/DTIP.2019.8752905⟩. ⟨hal-04503452⟩
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