A Robotic Strategy for In-Plane Center of Rotation Identification and Control in Atomic Force Microscopy
Résumé
This letter presents a method to determine and
control the center of rotation of a parallel micro-robotic platform
used as a sample holder for an Atomic Force Microscope (AFM).
The AFM is operating inside a Scanning Electron Microscope
(SEM) for correlative AFM in SEM imaging. The objective is to
spatially co-localize the Pivot Point (PP) and the AFM tip at any
region of interest of a sample within the reachable workspace of
the AFM. To do so, SEM images are used to land the AFM tip
on a desired Point Of Interest (POI). Topographic data obtained
with the AFM are used to calculate the Tool Center Point (TCP)
of the robot and to identify the coordinates of the POI in the AFM
sample holder reference frame. The position of the PP is then
controlled relying on the TCP and SEM vision to finally been
able to perform, in a controlled way, in-plane rotations of the
sample holder around the AFM tip with a micrometer precision.
This work shows for the first time how SEM and AFM data can
be used in tandem to calibrate the rotational degrees of freedom
of an AFM system.
Domaines
Automatique / RobotiqueOrigine | Fichiers produits par l'(les) auteur(s) |
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