Morphologies and optical properties of black silicon by room temperature reactive ion etching - Archive ouverte HAL
Article Dans Une Revue Materials Research Bulletin Année : 2020

Morphologies and optical properties of black silicon by room temperature reactive ion etching

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hal-04443216 , version 1 (07-02-2024)

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François Atteia, Judikaël Le Rouzo, Lou Denaix, David Duché, Gérard Berginc, et al.. Morphologies and optical properties of black silicon by room temperature reactive ion etching. Materials Research Bulletin, 2020, 131, pp.110973. ⟨10.1016/j.materresbull.2020.110973⟩. ⟨hal-04443216⟩
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