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Communication Dans Un Congrès Année : 2023

Investigation of the formation of nickel silicides on vertical silicon nanostructured channel for advanced electronics

Jonas Müller
Rémi Demoulin
Guilhem Larrieu
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Dates et versions

hal-04423814 , version 1 (29-01-2024)

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  • HAL Id : hal-04423814 , version 1

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Jonas Müller, Rémi Demoulin, Fuccio Cristiano, Guilhem Larrieu. Investigation of the formation of nickel silicides on vertical silicon nanostructured channel for advanced electronics. E-MRS 2023 SPRING MEETING, May 2023, Strasbourg, France. ⟨hal-04423814⟩
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