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Article Dans Une Revue Physica Scripta Année : 2023

Germanium-based nearly hyperuniform nanoarchitectures by ion beam impact

Jean-Benoit Claude
Mohammed Bouabdellaoui
  • Fonction : Auteur
Mario Khoury
  • Fonction : Auteur
Jerome Wenger
Monica Bollani
Marco Salvalaglio
Marco Abbarchi

Résumé

Abstract We address the fabrication of nano-architectures by impacting thin layers of amorphous Ge deposited on SiO 2 with a Ga + ion beam and investigate the structural and optical properties of the resulting patterns. By adjusting beam current and scanning parameters, different classes of nano-architectures can be formed, from elongated and periodic structures to disordered ones with a footprint of a few tens of nm. The latter disordered case features a significant suppression of large length scale fluctuations that are conventionally observed in ordered systems and exhibits a nearly hyperuniform character, as shown by the analysis of the spectral density at small wave vectors. It deviates from conventional random fields as accounted for by the analysis of Minkowski functionals. A proof of concept for potential applications is given by showing peculiar reflection properties of the resulting nano-structured films that exhibit colorization and enhanced light absorption with respect to the flat Ge layer counterpart (up to one order of magnitude at some wavelength). This fabrication method for disordered hyperuniform structures does not depend on the beam size. Being ion beam technology widely adopted in semiconductor foundries over 200 mm wafers, our work provides a viable pathway for obtaining disordered, nearly-hyperuniform materials by self-assembly with a footprint of tens of nanometers for electronic and photonic devices, energy storage and sensing.

Dates et versions

hal-04412918 , version 1 (23-01-2024)

Identifiants

Citer

Jean-Benoit Claude, Mohammed Bouabdellaoui, Mario Khoury, Jerome Wenger, Monica Bollani, et al.. Germanium-based nearly hyperuniform nanoarchitectures by ion beam impact. Physica Scripta, 2023, 98 (11), pp.115953. ⟨10.1088/1402-4896/acfa2d⟩. ⟨hal-04412918⟩
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