Impact of PECVD poly-Si on Tunnel Oxide for Passivating Contacts
Anatole Desthieux
(1, 2)
,
Jorge Posada
(3, 2)
,
Pierre-Philippe Grand
(3, 2)
,
Cédric Broussillou
(4)
,
Barbara Bazer-Bachi
(4)
,
Gilles Goaer
(4)
,
Davina Messou
(5, 3)
,
Muriel Bouttemy
(5, 3)
,
Etienne Drahi
(6, 3)
,
Pere Roca I Cabarrocas
(1, 3)