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Journal Articles Spectroscopy Year : 2023

High-Resolution High-Speed LIBS Microscopy

A. Tercier
  • Function : Author
E. Vasileva
  • Function : Author
C. Alvarez-Llamas
C. Fabre
  • Function : Author
S. Hermelin
  • Function : Author
B. Soula
  • Function : Author
F. Trichard
  • Function : Author
C. Dujardin


Laser-induced breakdown spectroscopy (LIBS) imaging instruments typically utilize lasers with repetition rates below 100 Hz since in most cases this regime provides a good balance of sampling frequency and laser pulse energy. However, measuring large sample areas of a several cm2 with high spatial resolution (<10 μm), at this frequency rate would be very time consuming since millions of spectral data points need to be collected in order to create a high-resolution image (3 h–15 h per cm2). In this work, we explore the approach to reduce, the acquisition time for high resolution LIBS imaging, or so-called μ-LIBS imaging, by using a laser operating in the kHz pulse repetition frequency (PRF) range. As a result, we describe and demonstrate a μ-LIBS imaging microscope which can image >6 cm2 sample areas with about 10 μm resolution in significantly shorter time (<20 min/cm2). The developed system opens a potential for variety of application fields where knowledge of elemental composition and elemental distribution is needed to perform conclusive analysis.

Dates and versions

hal-04389970 , version 1 (12-01-2024)



A. Tercier, E. Vasileva, C. Alvarez-Llamas, C. Fabre, S. Hermelin, et al.. High-Resolution High-Speed LIBS Microscopy. Spectroscopy, 2023, 38 (11), pp.34-40. ⟨10.56530/spectroscopy.sr2771p7⟩. ⟨hal-04389970⟩
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