Optical Actuation Performance of Phase-Change RF Switches
Résumé
Optical actuation of GeTe-based radio frequency switches is studied for the first time at 915-nm optical wavelength. By inducing self-heating of the phase change material through light absorption, this approach removes the need for integrated micro-heaters. First, laser pulse conditions required to set the RF switches in ON-and OFF-states are found with optical pulse peak powers up to few hundred mW. Amorphization is obtained for optical pulses of 100 to 500 ns, and crystallization for pulses of 2 to 6 μs . A resistivity ratio of 2E4 is measured between both states. Cycling endurance is performed on a 4×5μm2 switch, overpassing 1500 cycles, which is much higher compared to previously reported optical demonstrations. Small-signal measurements show 10% lower OFF-state capacitances using optical actuation compared to electrical actuation through micro-heaters. 37 dBm power handling capability is reported in the switch OFF-state at 915 MHz. This optical actuation demonstration corresponds to a standard wavelength in integrated photonic circuits and thus, this work constitutes a first step towards a CMOS compatible fully-integrated optical actuation solution for RF switches based on phase-change material
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2023_EDL_Charlet_Optical Actuation Performance of Phase-Change RF Switches_Proof.pdf (857.74 Ko)
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