A Tomographic Atom Probe laser assisted by a flexible optical system
Résumé
The use of ultra-fast laser pulses in Atom Probe Tomography (APT) opened the technique to the analysis of many non-conductive materials for micro-and opto-electronic, solar cells and even geologic materials. This technic, based on time of fight mass spectrometry (TOFMS) of field evaporated ions from a very thin needle, allows for 3d chemical mapping at nanometric scale. Nowadays, most of the APT systems use near ultraviolet (UV) light at a wavelength of λ~350nm. It is the outcome of years of research on lasertip interaction demonstrating that ultrashort near-UV light induces fast heating and cooling of the sample for almost all materials [1]. These fast thermal processes trigger the field evaporation on a short time scale (~1ns) resulting in high quality TOFMS.
Domaines
Physique [physics]
Fichier principal
a-tomographic-atom-probe-laser-assisted-by-a-flexible-optical-system.pdf (248 Ko)
Télécharger le fichier
Origine : Publication financée par une institution