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Article Dans Une Revue Microscopy and Microanalysis Année : 2021

A Tomographic Atom Probe laser assisted by a flexible optical system

Résumé

The use of ultra-fast laser pulses in Atom Probe Tomography (APT) opened the technique to the analysis of many non-conductive materials for micro-and opto-electronic, solar cells and even geologic materials. This technic, based on time of fight mass spectrometry (TOFMS) of field evaporated ions from a very thin needle, allows for 3d chemical mapping at nanometric scale. Nowadays, most of the APT systems use near ultraviolet (UV) light at a wavelength of λ~350nm. It is the outcome of years of research on lasertip interaction demonstrating that ultrashort near-UV light induces fast heating and cooling of the sample for almost all materials [1]. These fast thermal processes trigger the field evaporation on a short time scale (~1ns) resulting in high quality TOFMS.
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Dates et versions

hal-04360365 , version 1 (21-12-2023)

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Jonathan Houard, Angela Vella, Gérald da Costa, Ivan Blum, Fabien Delaroche, et al.. A Tomographic Atom Probe laser assisted by a flexible optical system. Microscopy and Microanalysis, 2021, 27 (S1), pp.1260 - 1261. ⟨10.1017/s1431927621004724⟩. ⟨hal-04360365⟩
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