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Communication Dans Un Congrès Année : 2023

Terahertz assisted Atom Probe Tomography: Effect of THz properties on ion’s behavior

Résumé

The atom probe tomography (APT) provides three-dimensional compositional mapping on an atomic scale. It allows to identify the chemical nature of the elements present in the material thanks to Time-Of-Flight Mass Spectrometry [TOF-MS] [1]. Its principle is based on the extraction of surface atoms from a nanometric needle-shaped sample biased at a high DC field. The DC electric field combined with a voltage pulse or a focused laser pulse triggers the extraction of the atoms, one by one, from the surface in a well-controlled way. The voltage pulses are used for metallic sample analysis while the laser pulses are used for non-metallic samples. However, the interaction of these pulses with the material induce a thermal heating which causes a low spatial and chemical resolutions [1].
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Dates et versions

hal-04357991 , version 1 (21-12-2023)

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Citer

Michella Karam, Loïc Rousseau, Ganesh Damarla, Jonathan Houard, Angela Vella. Terahertz assisted Atom Probe Tomography: Effect of THz properties on ion’s behavior. CLEO Europe 2023, Jun 2023, Munich (Allemagne), Germany. ⟨10.1109/CLEO/Europe-EQEC57999.2023.10231998⟩. ⟨hal-04357991⟩
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