Characteristics of Coplanar Waveguide of Small Cross Section on BCB with Coplanar Ground to Conductor-Backed Plane Interconnection - Archive ouverte HAL Accéder directement au contenu
Article Dans Une Revue Journal of Infrared, Millimeter and Terahertz Waves Année : 2019

Characteristics of Coplanar Waveguide of Small Cross Section on BCB with Coplanar Ground to Conductor-Backed Plane Interconnection

Résumé

Conductor-backed coplanar waveguide on 30-μm-thick BCB polymer is fabricated. In order to eliminate unwanted propagation modes for these lines designed for frequencies up to 1 THz, electroplated vias interconnect each coplanar ground to the backed conductor. Transmission line properties are extracted here up to 67 GHz, showing a characteristic impedance of about 50 Ω, but with high conduction losses for this frequency range due to the thin metal layer used. Thru-reflect-line correction and a de-embedding with electrical circuit of accesses are applied to extract line properties. The comparison with a coplanar waveguide model leads to a relative permittivity of 2.676 for the BCB in this low-frequency range.
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Dates et versions

hal-04354494 , version 1 (19-12-2023)

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Anne-Sophie Grimault-Jacquin, Nicolas Zerounian, Iméne Kaid Omar, Paul Crozat, Farah Amar, et al.. Characteristics of Coplanar Waveguide of Small Cross Section on BCB with Coplanar Ground to Conductor-Backed Plane Interconnection. Journal of Infrared, Millimeter and Terahertz Waves, 2019, 40 (10), pp.1010-1020. ⟨10.1007/s10762-019-00624-x⟩. ⟨hal-04354494⟩
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