Lithographic Processes for the Design of Biosurfaces
Résumé
Miniaturization is a key concept that, during the past 20 years, led the microelectronics industry to increase the integration rate up to 100 million transistors per chip, with a minimum size of features close to 100 nm. Today miniaturization plays an increasingly important role for the realization of various types of components used in telecommunication, micro-robotics, chemistry, biology, and biomedical research. For instance, miniaturization of biosensors must benefit from increase in the density of components, decrease in the amount and volume of a sample, improvement in detection limit, and precise control.