Fluidized-Bed MOCVD of Bi2O3 Thin Films from Bismuth Triphenyl under Atmospheric Pressure
Résumé
Bismuth oxide thin films are of great interest due to their significant band gap, high refractive index, and dielectric permittivity, as well as marked photoconductivity and photoluminescence.[1] These properties make Bi2O3 films well suited for many applications such as microelectronics,[2] sensor technology,[3] optical coatings,[4] and ceramic glass manufacturing.[5] In this work, we report the synthesis of Bi2O3 films on alumina particles using fluidized bed (FB) CVD under atmospheric pressure. Bismuth triphenyl (Bi(Ph)3) was used as a metal-organic (MO) CVD precursor.
Domaines
Chimie organique
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