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Article Dans Une Revue Plasma Sources Science and Technology Année : 2019

Impact of charged species transport coefficients on self-bias voltage in an electrically asymmetric RF discharge

Jean-Maxime Orlac’h
Vincent Giovangigli
Erik Johnson
Pere Roca I Cabarrocas

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hal-04286867 , version 1 (15-11-2023)

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Jean-Maxime Orlac’h, Tatiana Novikova, Vincent Giovangigli, Erik Johnson, Pere Roca I Cabarrocas. Impact of charged species transport coefficients on self-bias voltage in an electrically asymmetric RF discharge. Plasma Sources Science and Technology, 2019, 28 (5), pp.055003. ⟨10.1088/1361-6595/ab067d⟩. ⟨hal-04286867⟩
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