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Article Dans Une Revue Journal of Inverse and Ill-posed Problems Année : 2021

Inverse problem of Mueller polarimetry for metrological applications

Résumé

Abstract Inverse problem of Mueller polarimetry is defined as a determination of geometrical features of the metrological structures (i.e. 1D diffraction gratings) from its experimental Mueller polarimetric signature. This nonlinear problem was considered as an optimization problem in a multi-parametric space using the least square criterion and the Levenberg–Marquardt algorithm. We demonstrated that solving optimization problem with the experimental Mueller matrix spectra taken in conical diffraction configuration helps finding a global minimum and results in smaller variance values of reconstructed dimensions of the grating profile.
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Dates et versions

hal-04286302 , version 1 (15-11-2023)

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Tatiana Novikova, Pavel Bulkin. Inverse problem of Mueller polarimetry for metrological applications. Journal of Inverse and Ill-posed Problems, 2021, 29 (5), pp.759-774. ⟨10.1515/jiip-2020-0140⟩. ⟨hal-04286302⟩
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