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Article Dans Une Revue Mechanical Systems and Signal Processing Année : 2024

Dynamic analysis of a novel two-sided nonlinear MEMS electrostatic energy harvester

Résumé

In this work, we investigate the frequency response of an electrostatic MEMS energy harvester with innovative gap-overlap transducer design. We prove theoretically and experimentally that this design solution gives rise to a strongly nonlinear behaviour in MEMS dynamics. This is the first time that this phenomenon is demonstrated in a gap-overlap electrostatic MEMS along with a theoretical explanation. When increasing the bias voltage, the frequency response shifts towards lower frequencies while bending towards higher ones. The main consequence of this bending is a significant increase of the system bandwidth (+280 % compared to a linear situation with no bias voltage for the same device) when the bias voltage increases up to 30 V. A proposed gap-overlap transducer configuration is demonstrated to be a simple and efficient solution for MEMS energy harvester bandwidth increase.

Dates et versions

hal-04281903 , version 1 (13-11-2023)

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Citer

Bogdan Vysotskyi, Alexis Brenes, Jose-Francisco Ambia Campos, Elie Lefeuvre. Dynamic analysis of a novel two-sided nonlinear MEMS electrostatic energy harvester. Mechanical Systems and Signal Processing, 2024, 206, pp.110932. ⟨10.1016/j.ymssp.2023.110932⟩. ⟨hal-04281903⟩
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