Round-Trip Sensitivity-Bandwidth Optimization and Characterization of High-Frequency PMUTs - Archive ouverte HAL Accéder directement au contenu
Communication Dans Un Congrès Année : 2023

Round-Trip Sensitivity-Bandwidth Optimization and Characterization of High-Frequency PMUTs

Résumé

Piezoelectric micromachined ultrasonic transducers (PMUTs) are fabricated with Micro-Electro-Mechanical Systems (MEMS) processes. They have advantages such as high uniformity and density, high flexibility in array configuration, and compatibility with integrated circuits. However, PMUTs generally have bottleneck issues with round-trip sensitivity, which restrict the improvement of acoustical imaging resolution. In this work, a round-trip modeling and optimization method is proposed to better analyze the round-trip sensitivity and solve the round-trip bottleneck problem of the PMUTs. Besides, the COMSOL livelinked with MATLAB to greatly simplify the calculation complexity is used to eliminate the influence of geometric parameters on center frequency variations and sweep several radii and thickness parameters.
Fichier non déposé

Dates et versions

hal-04268549 , version 1 (02-11-2023)

Identifiants

Citer

Leming He, Ning Lv, Wei-Jiang Xu, Yan Wang, Junyan Ren. Round-Trip Sensitivity-Bandwidth Optimization and Characterization of High-Frequency PMUTs. 2023 IEEE International Symposium on Applications of Ferroelectrics (ISAF), Jul 2023, Cleveland, United States. pp.1-4, ⟨10.1109/ISAF53668.2023.10265321⟩. ⟨hal-04268549⟩
7 Consultations
0 Téléchargements

Altmetric

Partager

Gmail Facebook X LinkedIn More