Innovative guided mode method for measuring the penetration depth in partially exposed photo-resist layers - Archive ouverte HAL Accéder directement au contenu
Proceedings/Recueil Des Communications Année : 2012
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hal-04251245 , version 1 (20-10-2023)

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Thomas Wood, Vincent Brissonneau, Jean-Baptiste Brückner, Gérard Berginc, François Flory, et al.. Innovative guided mode method for measuring the penetration depth in partially exposed photo-resist layers. pp.84860Z, 2012, ⟨10.1117/12.928692⟩. ⟨hal-04251245⟩
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