Nano-lithography by SPM-induced oxidation: role of space charge in the kinetics of oxide growth - Archive ouverte HAL Accéder directement au contenu
Communication Dans Un Congrès Année : 1999
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hal-04249195 , version 1 (19-10-2023)

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Emmanuel Dubois, Jean-Luc Bubendorff. Nano-lithography by SPM-induced oxidation: role of space charge in the kinetics of oxide growth. Proc. of the International Semiconductor Device Research Symposium ISDRS’99, Dec 1999, Charlottesville, United States. ⟨hal-04249195⟩
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