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Brevet Année : 1990

Laser micro-film machine for processing objects having thin films such as integrated circuits

Girard J.J.
  • Fonction : Auteur
Pelous G.
  • Fonction : Auteur

Résumé

A laser micro-beam machine for processing objects (18) which have thin films, comprising a laser (10) coupled with a microscope (14) and characterized in that the laser (10) is a low average power pulsed laser producing very short pulses. The machine can be used in particular for cutting thermally conductive layers on integrated electronic circuits.
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Dates et versions

hal-04236562 , version 1 (11-10-2023)

Identifiants

  • HAL Id : hal-04236562 , version 1

Citer

D. Tonneau, Girard J.J., Pelous G.. Laser micro-film machine for processing objects having thin films such as integrated circuits. France, Patent n° : WO1991011288A1. 1990, https://patents.google.com/patent/WO1991011288A1/en. ⟨hal-04236562⟩
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