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Article Dans Une Revue Journal of Applied Physics Année : 1989

Deposition of nickel microstructures by CO2 laser-assisted decomposition of nickel tetracarbonyl

G. Auvert
  • Fonction : Auteur
Y. Pauleau
  • Fonction : Auteur

Résumé

Nickel microstructures were produced from decomposition of Ni(CO)4 on quartz plates locally heated with a focused cw CO2 laser beam operating at 10.59 μm. The profile and deposition rate of Ni dots were determined as functions of irradiation time, reactant pressure, laser power, and laser-induced surface temperature. The kinetic data were found to be in good agreement with those of the visible laser-induced chemical vapor deposition (CVD) of Ni dots and CVD of Ni films in furnace-type CVD reactors. The decomposition of Ni(CO)4 molecules irradiated with the infrared laser light occurred via a purely thermal process.
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Dates et versions

hal-04236250 , version 1 (10-10-2023)

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D. Tonneau, G. Auvert, Y. Pauleau. Deposition of nickel microstructures by CO2 laser-assisted decomposition of nickel tetracarbonyl. Journal of Applied Physics, 1989, 66 (1), pp.165-168. ⟨10.1063/1.343898⟩. ⟨hal-04236250⟩
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