Deposition of nickel microstructures by CO2 laser-assisted decomposition of nickel tetracarbonyl
Résumé
Nickel microstructures were produced from decomposition of Ni(CO)4 on quartz plates locally heated with a focused cw CO2 laser beam operating at 10.59 μm. The profile and deposition rate of Ni dots were determined as functions of irradiation time, reactant pressure, laser power, and laser-induced surface temperature. The kinetic data were found to be in good agreement with those of the visible laser-induced chemical vapor deposition (CVD) of Ni dots and CVD of Ni films in furnace-type CVD reactors. The decomposition of Ni(CO)4 molecules irradiated with the infrared laser light occurred via a purely thermal process.