Improved colour separation for a backside illuminated image sensor with 1.4 µm pixel pitch
Résumé
We demonstrate a back illuminated colour image sensor with a 1.4µm pixel pitch. A novel backside adapted pinned deep diode on n-substrates has been developed and characterized in order to achieve an improved colour separation. High quantum efficiency around 60% in the visible light spectrum has been attained whereas the other parameters stay in line with standard front side illuminated image sensors.
Fichier principal
Prima 2009 - Improved colour separation for a backside illuminated image sensor with 1.4um pixel pitch.pdf (332.16 Ko)
Télécharger le fichier
Origine : Fichiers produits par l'(les) auteur(s)