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Communication Dans Un Congrès Année : 2009

Improved colour separation for a backside illuminated image sensor with 1.4 µm pixel pitch

Résumé

We demonstrate a back illuminated colour image sensor with a 1.4µm pixel pitch. A novel backside adapted pinned deep diode on n-substrates has been developed and characterized in order to achieve an improved colour separation. High quantum efficiency around 60% in the visible light spectrum has been attained whereas the other parameters stay in line with standard front side illuminated image sensors.
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Dates et versions

hal-04235663 , version 1 (10-10-2023)

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  • HAL Id : hal-04235663 , version 1

Citer

Jens Prima, Francois Roy, Hugues Leininger, Christophe Cowache, Jérôme Vaillant, et al.. Improved colour separation for a backside illuminated image sensor with 1.4 µm pixel pitch. IISW 2009 - International Image Sensor Workshop, Jun 2009, Bergen, Norway. ⟨hal-04235663⟩
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