Planar microlenses for near infrared CMOS image sensors
Résumé
In this paper we present planar microlenses designed to improve the sensitivity of SPAD pixels. We designed diffractive and metasurface planar microlens structures based on rigorous optical simulations, then we implemented the diffractive microlens on a SPAD design available on STMicroelectronics 40nm CMOS testchips (32 × 32 SPAD array), and compared with the process of reference melted microlens. We characterized circuits and demonstrated optical gain from our designed microlenses (numbers to be added).
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