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Article Dans Une Revue Oxidation of Metals Année : 1991

Effect of silicon surface-cleaning procedures on the growth of Cu3Si on Si(100)-oriented wafers

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Chimie

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hal-04229471 , version 1 (05-10-2023)

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Dominique Viale, Guy Weber, Bernard Gillot. Effect of silicon surface-cleaning procedures on the growth of Cu3Si on Si(100)-oriented wafers. Oxidation of Metals, 1991, 35 (5-6), pp.415-426. ⟨10.1007/BF00664712⟩. ⟨hal-04229471⟩
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