2.5D Technology based on Vertically Aligned Carbon Nanotubes for MM-Waves Passive Devices - Archive ouverte HAL
Communication Dans Un Congrès Année : 2023

2.5D Technology based on Vertically Aligned Carbon Nanotubes for MM-Waves Passive Devices

Résumé

An original 2.5 technology based on vertically aligned Carbon Nanotubes (VACNTs) to produce millimeter-waves Air-Filled WaveGuide (AFWG) structures is described in this paper. The design of AFWG is based on bundle of VACNTs acting as WG’s metallic lateral walls. A CMOS compatible CNTs process is developed to fabricate the WG using a dedicated assembly process. Raman spectroscopy and molecular dynamics are applied to study the effects of the CNTs compression during the fabrication process. An example of the realization of a V band AFWG is presented together with S-parameters measurements which validate the concept of VACNTs-based AFWG. In addition, the experimental attenuation constant is estimated at 0.5 dB/mm between 81–86 GHz.
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Dates et versions

hal-04195000 , version 1 (04-09-2023)

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Simon Chun Kiat Goh, Chun Fei Siah, Joseph de Saxce, Zhikai Ng, Li Lynn Shiau, et al.. 2.5D Technology based on Vertically Aligned Carbon Nanotubes for MM-Waves Passive Devices. 2023 IEEE/MTT-S International Microwave Symposium - IMS 2023, Jun 2023, San Diego, United States. pp.767-770, ⟨10.1109/IMS37964.2023.10188055⟩. ⟨hal-04195000⟩
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