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Communication Dans Un Congrès Année : 2023

Nanorobotics and Automatic On-Wafer Probe Station with Nanometer Positionning Accuracy

Résumé

Precise and repeatable radiofrequency (RF) measurements call for innovative characterization techniques. In particular, the use of nanorobotics for on-wafer measurements is a viable solution to address RF characterization with enhanced alignment accuracy. In this work, we present the development of a nanorobotics and automatic on-wafer probing station designed and realized for GSG on-wafer millimetre-wave measurements.
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Dates et versions

hal-04182408 , version 1 (17-08-2023)

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Cerine Mokhtari, Daouda Seck, Djamel Allal, Clément Lenoir, Mohamed Sebbache, et al.. Nanorobotics and Automatic On-Wafer Probe Station with Nanometer Positionning Accuracy. 2023 IEEE MTT-S International Conference on Numerical Electromagnetic and Multiphysics Modeling and Optimization (NEMO), Jun 2023, Winnipeg, Canada. pp.22-24, ⟨10.1109/NEMO56117.2023.10202165⟩. ⟨hal-04182408⟩
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