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Article Dans Une Revue Surface and Coatings Technology Année : 2000

Mechanical properties of Al/Al2O3 nanolaminated films: correlation to microstructure

Résumé

Wear resistance and the hardness of Al/Al2O3 nanolaminated films were investigated in this study. Monolithic films and multilayers were deposited on a silicon substrate with two different substrate temperatures: Ts=25°C and Ts=−90°C. The period thickness of multilayers was lowering from 40 to 2 nm. From nanoindentation measurements, it appears that the hardness of multilayers has an intermediate value between those of metal (Al ) and ceramic (Al2O3). The tribological test was conducted by the pin-on-disc method. The Ts=25°C deposited multilayers, as well as single films, demonstrated poor wear resistance. The best wear resistance was obtained for multilayers deposited at the lowest substrate temperature (Ts=−90°C). The results are in good agreement with structural characterization. X-ray reflectometry demonstrated that the multilayer character of Al/Al2O3 is more pronounced for Ts=−90°C. © 2000 Elsevier Science S.A. All rights reserved.

Dates et versions

hal-04173893 , version 1 (30-07-2023)

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M. Ben Daia, P. Aubert, S. Labdi, C. Le Paven-Thivet, P. Houdy, et al.. Mechanical properties of Al/Al2O3 nanolaminated films: correlation to microstructure. Surface and Coatings Technology, 2000, 125 (1-3), pp.196-200. ⟨10.1016/s0257-8972(99)00545-9⟩. ⟨hal-04173893⟩

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