Mechanical properties of Al/Al2O3 nanolaminated films: correlation to microstructure
Résumé
Wear resistance and the hardness of Al/Al2O3 nanolaminated films were investigated in this study. Monolithic films and
multilayers were deposited on a silicon substrate with two different substrate temperatures: Ts=25°C and Ts=−90°C. The period
thickness of multilayers was lowering from 40 to 2 nm. From nanoindentation measurements, it appears that the hardness of
multilayers has an intermediate value between those of metal (Al ) and ceramic (Al2O3). The tribological test was conducted by
the pin-on-disc method. The Ts=25°C deposited multilayers, as well as single films, demonstrated poor wear resistance. The best
wear resistance was obtained for multilayers deposited at the lowest substrate temperature (Ts=−90°C). The results are in good
agreement with structural characterization. X-ray reflectometry demonstrated that the multilayer character of Al/Al2O3 is more
pronounced for Ts=−90°C. © 2000 Elsevier Science S.A. All rights reserved.