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Article Dans Une Revue Surface and Coatings Technology Année : 2000

Interface effect on tribological properties of titanium–titanium nitride nanolaminated structures

Résumé

anolaminated titanium]titanium nitride wTi]TiNxn structures have been deposited on silicon 100: substrates by RF reactive sputtering in order to study their mechanical properties. Structures with graded TirTiN interface thickness of approx. 2 nm. and with ultra-thin TirTiN interfaces approx. 0.5 nm. have been investigated with multilayer period thicknesses ranging between 20 and 2.5 nm. The deposition followed by in situ kinetic ellipsometry point out the two types of interfaces. Real period thicknesses, measured by X-ray reflectometry, are close to the expected ones. Thin film X-ray diffraction analysis shows the polycrystalline nature of the nanostuctures. In the superlattice, Ti and TiN individual layers are textured w002x and w111x, respectively. Tribological tests, carried out using a CSEM pin-on-disc apparatus, point out that the wear resistance of the samples increase when the period thickness is lowered same total thickness and growth parameters.. For small period thickness, the interface quality has a crucial influence on the wear resistance of the samples. Best tribological properties are observed for samples with ultra-thin interfaces and a period thickness of 2.5 nm.

Dates et versions

hal-04173891 , version 1 (30-07-2023)

Identifiants

Citer

Catherine Sant, Mouloud Ben Daia, Pascal Aubert, Sid Labdi, Philippe Houdy. Interface effect on tribological properties of titanium–titanium nitride nanolaminated structures. Surface and Coatings Technology, 2000, 127 (2-3), pp.167-173. ⟨10.1016/s0257-8972(00)00663-0⟩. ⟨hal-04173891⟩

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