Water-soluble bio-sourced resists for DUVlithography in a 200/300mm pilot line environment Oral Presentation - Archive ouverte HAL
Communication Dans Un Congrès Année : 2022

Water-soluble bio-sourced resists for DUVlithography in a 200/300mm pilot line environment Oral Presentation

Alexandre Teolis
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hal-04151042 , version 1 (04-07-2023)

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  • HAL Id : hal-04151042 , version 1

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Isabelle Servin, Alexandre Teolis, Arnaud Bazin, Paule Durin, Olha Sysova, et al.. Water-soluble bio-sourced resists for DUVlithography in a 200/300mm pilot line environment Oral Presentation. ICPST, May 2022, Virtual, France. ⟨hal-04151042⟩
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