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Article Dans Une Revue Journal of Micromechanics and Microengineering Année : 2009

A microactuator based on the decomposition of an energetic material for disposable lab-on-chip applications: fabrication and test

Résumé

A microactuator consisting of an inflatable elastic membrane based on the decomposition of a small mass of energetic material deposited on a silicon microstructured platform is presented for disposable lab-on-a-chip applications. The energetic-material-based actuator is characterized by its small size (<0.25 mm2 × 100 µm), bio-compatibility and capability of generating sufficient overpressures (>10 kPa) under low electrical power (<100 mW) to eject a few nanolitres of fluid. This device has been fabricated using MEMS and microfluidic-compatible technology. The characterization of the actuation gave a pressurization of 13 kPa and a membrane deformation of 46 µm for an electrical initial power of 90 mW (6.5 V, 13.9 mA). All these characteristics make such a microactuator well adapted for microfluidic applications and especially for the ejection of fluids contained in micro-channels of a disposable lab-on-a-chip.

Domaines

Polymères Chimie

Dates et versions

hal-04141976 , version 1 (26-06-2023)

Identifiants

Citer

Gustavo Ardila Rodríguez, Samuel Suhard, Carole Rossi, Daniel Estève, Pierre Fau, et al.. A microactuator based on the decomposition of an energetic material for disposable lab-on-chip applications: fabrication and test. Journal of Micromechanics and Microengineering, 2009, 19 (1), pp.015006. ⟨10.1088/0960-1317/19/1/015006⟩. ⟨hal-04141976⟩
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